Electron-energy-loss spectroscopy characterization of the sp bonding fraction within carbon thin films

نویسندگان

  • A. J. Papworth
  • C. J. Kiely
  • A. P. Burden
  • S. R. P. Silva
  • G. A. J. Amaratunga
چکیده

A. J. Papworth, C. J. Kiely, A. P. Burden, S. R. P. Silva,* and G. A. J. Amaratunga Department Electrical and Electronic Engineering, University of Liverpool, Liverpool, L69 3GJ, United Kingdom Department of Engineering, Materials Science and Engineering, University of Liverpool, Liverpool, L69 3BX, United Kingdom School of Electronic Engineering, University of Surrey, Guildford, Surrey, GU2 5XH, United Kingdom Department of Engineering, University of Cambridge, Cambridge, CB2 1PZ, United Kingdom ~Received 9 April 1999; revised manuscript received 6 March 2000!

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

0 M ay 1 99 9 Carbon films with a novel sp 2 network structure

Laser-Arc evaporation of a graphite target has been used to deposit carbon films that exhibit high hardness (45 GPa) and elastic recovery (85%). High Resolution Electron Microscopy (HREM) and Electron Energy Loss Spectroscopy (EELS) were subsequently used to study the microstructure and bonding of the resultant layers. The structure of the films from HREM is seen to consist of a dense array of ...

متن کامل

On the determination of the sp to sp ratio in diamond-like carbon thin films

The carbon bonding ratio in diamond-like carbon (DLC) thin films has been estimated from the e2 spectra obtained by spectroscopic ellipsometry. A method has been developed to find out the atomic fractions of spand sp-bonded carbon atoms by combining the various features of the existing methods. The atomic fraction of sp-bonded carbon atoms has been determined by fitting the gaussian curves in t...

متن کامل

Composition and chemical bonding of pulsed laser deposited carbon nitride thin films

We studied composition, structure, and growth parameters of amorphous diamond-like carbon ~DLC! and carbon nitride (CNx) films deposited by pulsed laser deposition in vacuum and in nitrogen atmosphere. The composition (0<N/C<0.4), the structural and the electronic properties of the deposited carbon and carbon nitride films were investigated for different laser fluences ~1–12 J/cm!. Electron ene...

متن کامل

Influence of precursor gases on the structure of plasma deposited amorphous hydrogenated carbon–nitrogen films

The atomic structure of amorphous hydrogenated carbon–nitrogen films was studied by electron energy loss spectroscopy ~EELS!. The films were deposited onto Si~100! substrates by rf plasma decomposition of CH4–NH3 and CH4–N2 mixtures, with substrates placed on the powered electrode of a diode glow-discharge system. The sp fraction of C and N atoms as a function of the nitrogen content in the fil...

متن کامل

Pulsed Laser Deposition of Diamond-like Carbon Thin Films: Ablation Dynamics and Growth

Thin films of diamond-like carbon have been grown by pulsed laser deposition using a Nd:YAG laser at 532 nm. Time-of-flight mass spectroscopy was used to investigate the effects of laser power density and background gas pressure on the plume characteristics including the species in the plume and the kinetic energy distribution of each species. We found that with increasing laser power density (...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2000